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1

Catalytic Chemical Vapor Deposition (Technology and Applications of Cat-CVD) || Introduction

Matsumura, Hideki, Umemoto, Hironobu, Gleason, Karen K., Schropp, Ruud E.I.

Year:

2019

Language:

english

File:

PDF, 165 KB

english, 2019

2

Catalytic Chemical Vapor Deposition (Technology and Applications of Cat-CVD) || Physics and Chemistry of Cat-CVD

Matsumura, Hideki, Umemoto, Hironobu, Gleason, Karen K., Schropp, Ruud E.I.

Year:

2019

Language:

english

File:

PDF, 879 KB

english, 2019

3

[IEEE 2020 IEEE International Solid- State Circuits Conference - (ISSCC) - San Francisco, CA, USA (2020.2.16-2020.2.20)] 2020 IEEE International Solid- State Circuits Conference - (ISSCC) - 5.8 A 0.50e -rms Noise 1.45Âµm-Pitch CMOS Image Sensor with Reference-Shared In-Pixel Differential Amplifier at 8.3Mpixel 35fps

Sato, Mamoru, Yorikado, Yuhi, Matsumura, Yusuke, Naganuma, Hideki, Kato, Eriko, Toyofuku, Takuya, Kato, Akihiko, Oike, Yusuke

Year:

2020

File:

PDF, 957 KB

2020

4

A novel method for suppressing silicidation of tungsten catalyzer during silane decomposition in Cat-CVD

Kazuhiro Honda, Keisuke Ohdaira, Hideki Matsumura

Journal:

Thin Solid Films

Year:

2008

Language:

english

File:

PDF, 280 KB

english, 2008

5

Cat-CVD (hot-wire CVD): how different from PECVD in preparing amorphous silicon

Hideki Matsumura, Hironobu Umemoto, Atsushi Masuda

Journal:

Journal of Non-Crystalline Solids

Year:

2004

Language:

english

File:

PDF, 411 KB

english, 2004

6

Investigation of surface treatment effect of catalyst on the lifetime for Cat-CVD method

Kazuhiro Honda, Keisuke Ohdaira, Hideki Matsumura

Journal:

Journal of Non-Crystalline Solids

Year:

2008

Language:

english

File:

PDF, 480 KB

english, 2008

7

Spermine signaling plays a significant role in the defense response of Arabidopsis thaliana to cucumber mosaic virus

Yoshiko Mitsuya, Yoshihiro Takahashi, Thomas Berberich, Atsushi Miyazaki, Hideo Matsumura, Hideki Takahashi, Ryohei Terauchi, Tomonobu Kusano

Journal:

Journal of Plant Physiology

Year:

2009

Language:

english

File:

PDF, 1.19 MB

english, 2009

8

Completely contactless linear DC motor using magnetic suspension

Matsumura, Fumio, Maeda, Shinji, Fujita, Masayuki, Fukuzono, Hideki

Journal:

Electrical Engineering in Japan

Year:

1987

Language:

english

File:

PDF, 1.38 MB

english, 1987

9

First-principles study of hydrogen-enhanced phosphorus diffusion in silicon

The Anh, Le, Tien Cuong, Nguyen, Lam, Pham Tien, Manoharan, Muruganathan, Mizuta, Hiroshi, Matsumura, Hideki, Otsuka, Nobuo, Hieu Chi, Dam

Journal:

Journal of Applied Physics

Year:

2016

Language:

english

File:

PDF, 1.81 MB

english, 2016

10

Temperature Characteristics of a Hybrid Electric Vehicle Fire

Matsumura, Hideki, Itoh, Shinichiro, Matsushima, Kazuo, okada, Takeo

Journal:

SAE International Journal of Alternative Powertrains

Year:

2012

Language:

english

File:

PDF, 11.27 MB

english, 2012

11

Catalytic Chemical Vapor Deposition (Technology and Applications of Cat-CVD) || Fundamentals for Studying the Physics of Cat-CVD and Difference from PECVD

Matsumura, Hideki, Umemoto, Hironobu, Gleason, Karen K., Schropp, Ruud E.I.

Year:

2019

Language:

english

File:

PDF, 1004 KB

english, 2019

12

Catalytic Chemical Vapor Deposition (Technology and Applications of Cat-CVD) || Physics and Technologies for Operating Cat-CVD Apparatus

Matsumura, Hideki, Umemoto, Hironobu, Gleason, Karen K., Schropp, Ruud E.I.

Year:

2019

Language:

english

File:

PDF, 2.50 MB

english, 2019

13

Super Water-Repellent Treatment of Clothing Fibers by Cat-CVD; Cat-CVD法を用いた繊維の超撥水加工;

MATSUMURA, Hideki

Journal:

Journal of The Surface Finishing Society of Japan

Year:

2017

File:

PDF, 2.08 MB

2017

14

Compressions of some nitriles under pressures up to 150 MPa at 298.15 K

Yasuhiro Uosaki, Hajime Matsumura, Hideki Ogiyama, Takashi Moriyoshi

Journal:

The Journal of Chemical Thermodynamics

Year:

1990

Language:

english

File:

PDF, 266 KB

english, 1990

15

Back-scattering study of heavy-ion distribution in semiconductors

Seijiro Furukawa, Hideki Matsumura, Hiroshi Ishiwara

Journal:

Thin Solid Films

Year:

1973

Language:

english

File:

PDF, 362 KB

english, 1973

16

Future prospect of remote Cat-CVD on the basis of the production, transportation and detection of H atoms

Hironobu Umemoto, Hideki Matsumura

Journal:

Thin Solid Films

Year:

2008

Language:

english

File:

PDF, 128 KB

english, 2008

17

A novel patterning technique using super-hydrophobic PTFE thin films by Cat-CVD method

Michihisa Takachi, Hiroaki Yasuoka, Keisuke Ohdaira, Tatsuya Shimoda, Hideki Matsumura

Journal:

Thin Solid Films

Year:

2009

Language:

english

File:

PDF, 655 KB

english, 2009

18

Thin-film polycrystalline silicon solar cells formed by flash lamp annealing of a-Si films

Yohei Endo, Tomoko Fujiwara, Keisuke Ohdaira, Shogo Nishizaki, Kensuke Nishioka, Hideki Matsumura

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 357 KB

english, 2010

19

Drastic suppression of the optical reflection of flash-lamp-crystallized poly-Si films with spontaneously formed periodic microstructures

Keisuke Ohdaira, Takuya Nishikawa, Kazuhiro Shiba, Hiroyuki Takemoto, Hideki Matsumura

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 795 KB

english, 2010

20

Excellent passivation effect of Cat-CVD SiNx/i-a-Si stack films on Si substrates

Koichi Koyama, Keisuke Ohdaira, Hideki Matsumura

Journal:

Thin Solid Films

Year:

2011

Language:

english

File:

PDF, 538 KB

english, 2011

21

Advantage of plasma-less deposition in Cat-CVD to the performance of electronic devices

Hideki Matsumura, Tomoaki Hasegawa, Shogo Nishizaki, Keisuke Ohdaira

Journal:

Thin Solid Films

Year:

2011

Language:

english

File:

PDF, 573 KB

english, 2011

22

Extremely low recombination velocity on crystalline silicon surfaces realized by low-temperature impurity doping in Cat-CVD technology

Taro Hayakawa, Motoharu Miyamoto, Koichi Koyama, Keisuke Ohdaira, Hideki Matsumura

Journal:

Thin Solid Films

Year:

2011

Language:

english

File:

PDF, 432 KB

english, 2011

23

Low resistivity metal lines formed by functional liquids and successive treatment of catalytically generated hydrogen atoms in the Cat-CVD system

Nguyen Thi Thanh Kieu, Keisuke Ohdaira, Tatsuya Shimoda, Hideki Matsumura

Journal:

Thin Solid Films

Year:

2011

Language:

english

File:

PDF, 547 KB

english, 2011

24

Flash-lamp-crystallized polycrystalline silicon films with high hydrogen concentration formed from Cat-CVD a-Si films

Keisuke Ohdaira, Naohito Tomura, Shohei Ishii, Hideki Matsumura

Journal:

Thin Solid Films

Year:

2011

Language:

english

File:

PDF, 377 KB

english, 2011

25

Development of Cat-CVD apparatus for 1-m-size large-area deposition

Keiji Ishibashi, Minoru Karasawa, Ge Xu, Naoaki Yokokawa, Manabu Ikemoto, Atsushi Masuda, Hideki Matsumura

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 632 KB

english, 2003

26

In situ chamber cleaning using atomic H in catalytic-CVD apparatus for mass production of a-Si:H solar cells

Atsushi Masuda, Yoriko Ishibashi, Kenji Uchida, Koji Kamesaki, Akira Izumi, Hideki Matsumura

Journal:

Solar Energy Materials and Solar Cells

Year:

2002

Language:

english

File:

PDF, 89 KB

english, 2002

27

Study for improvement of solar cell efficiency by impurity photovoltaic effect

Hiroto Kasai, Hideki Matsumura

Journal:

Solar Energy Materials and Solar Cells

Year:

1997

Language:

english

File:

PDF, 380 KB

english, 1997

28

Drastic reduction in surface recombination velocity of crystalline silicon by surface treatment using catalytically-generated radicals

Hideki Matsumura, Motoharu Miyamoto, Koichi Koyama, Keisuke Ohdaira

Journal:

Solar Energy Materials and Solar Cells

Year:

2011

Language:

english

File:

PDF, 395 KB

english, 2011

29

Study on cat-CVD poly-Si films for solar cell application

Ritsuko Iiduka, Akira Heya, Hideki Matsumura

Journal:

Solar Energy Materials and Solar Cells

Year:

1997

Language:

english

File:

PDF, 337 KB

english, 1997

30

Association of endometriosis-related infertility with age at menopause

Toshiyuki Yasui, Kunihiko Hayashi, Hideki Mizunuma, Toshiro Kubota, Takeshi Aso, Yasuhiro Matsumura, Jung-Su Lee, Shosuke Suzuki

Journal:

Year:

2011

Language:

english

File:

PDF, 203 KB

english, 2011

31

Flash-lamp-induced explosive crystallization of amorphous germanium films leaving behind periodic microstructures

Keisuke Ohdaira, Hideki Matsumura

Journal:

Thin Solid Films

Year:

2012

Language:

english

File:

PDF, 1011 KB

english, 2012

32

Genome sequencing reveals agronomically important loci in rice using MutMap

Abe, Akira, Kosugi, Shunichi, Yoshida, Kentaro, Natsume, Satoshi, Takagi, Hiroki, Kanzaki, Hiroyuki, Matsumura, Hideo, Yoshida, Kakoto, Mitsuoka, Chikako, Tamiru, Muluneh, Innan, Hideki, Cano, Liliana

Journal:

Nature Biotechnology

Year:

2012

Language:

english

File:

PDF, 1.07 MB

english, 2012

33

Histological maturation of vascular smooth muscle cells in in situ tissue-engineered vasculature

Isayama, Noriko, Matsumura, Goki, Sato, Hideki, Matsuda, Shojiro, Yamazaki, Kenji

Journal:

Year:

2014

Language:

english

File:

PDF, 3.34 MB

english, 2014

34

Low temperature boron doping into crystalline silicon by boron-containing species generated in Cat-CVD apparatus

Ohta, Tatsunori, Koyama, Koichi, Ohdaira, Keisuke, Matsumura, Hideki

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 363 KB

english, 2015

35

[IEEE 2010 7th IEEE International Conference on Group IV Photonics (GFP) - Beijing, China (2010.09.1-2010.09.3)] 7th IEEE International Conference on Group IV Photonics - Propagation loss of amorphous silicon optical waveguides at the 0.8 µm-wavelength range

Asukai, Takahiro, Inamoto, Makoto, Maruyama, Takeo, Iiyama, Koichi, Ohdaira, Keisuke, Matsumura, Hideki

Year:

2010

Language:

english

File:

PDF, 804 KB

english, 2010

36

[IEEE 2014 IEEE International Ultrasonics Symposium (IUS) - Chicago, IL, USA (2014.9.3-2014.9.6)] 2014 IEEE International Ultrasonics Symposium - Bandwidth-tunable filter consisting of SAW resonators and BaSrTiO3 varactors directly fabricated on a LiTaO3 wafer

Kimura, Tetsuya, Kobayashi, Hideaki, Kishimoto, Yutaka, Kato, Hideyuki, Inaba, Masahiro, Hashimoto, Ken-ya, Matsumura, Takeshi, Hirano, Hideki, Kadota, Michio, Esashi, Masayoshi, Tanaka, Shuji

Year:

2014

Language:

english

File:

PDF, 1011 KB

english, 2014

37

Theoretical Considerations on Lateral Spread of Implanted Ions

Furukawa, Seijiro, Matsumura, Hideki, Ishiwara, Hiroshi

Journal:

Japanese Journal of Applied Physics

Year:

1972

File:

PDF, 1.14 MB

1972

38

Coating techniques of metal chambers for remote catalytic chemical vapor deposition applications

Umemoto, Hironobu, Setoguchi, Shota, Uemura, Hitoshi, Matsumura, Hideki

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2008

Language:

english

File:

PDF, 344 KB

english, 2008

39

Technique for the production, preservation, and transportation of H atoms in metal chambers for processings

Ansari, S. G., Umemoto, Hironobu, Morimoto, Takashi, Yoneyama, Koji, Masuda, Atsushi, Matsumura, Hideki, Ikemoto, Manabu, Ishibashi, Keiji

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2005

Language:

english

File:

PDF, 536 KB

english, 2005

40

Effect of hydrogen on passivation quality of SiNx/Si-rich SiNx stacked layers deposited by catalytic chemical vapor deposition on c-Si wafers

Thi, Trinh Cham, Koyama, Koichi, Ohdaira, Keisuke, Matsumura, Hideki

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 474 KB

english, 2015

41

Deposition of moisture barrier films by catalytic CVD using hexamethyldisilazane

Ohdaira, Keisuke, Matsumura, Hideki

Journal:

Japanese Journal of Applied Physics

Year:

2014

Language:

english

File:

PDF, 1.65 MB

english, 2014

42

[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Cat-CVD (Catalytic-CVD); Its Fundamentals and Application

Matsumura, Hideki, Ohdaira, Keisuke

Year:

2009

Language:

english

File:

PDF, 474 KB

english, 2009

43

Nitridation of Ultrathin SiO 2 Layers in Metal-Ferroelectric-Insulator-Semiconductor Structures

HIRAKAWA, MASAKAZU, HIROOKA, GEN, NODA, MINORU, OKUYAMA, MASANORI, HONDA, KAZUHIRO, MASUDA, ATSUSHI, MATSUMURA, HIDEKI

Journal:

Integrated Ferroelectrics

Year:

2004

Language:

english

File:

PDF, 1.01 MB

english, 2004

44

Moving Tunable Filters Forward: A \"Heterointegration\" Research Project for Tunable Filters Combining MEMS and RF SAW\/BAW Technologies

Hashimoto, Ken-ya, Kimura, Tetsuya, Matsumura, Takeshi, Hirano, Hideki, Kadota, Michio, Esashi, Masayoshi, Tanaka, Shuji

Journal:

IEEE Microwave Magazine

Year:

2015

Language:

english

File:

PDF, 3.07 MB

english, 2015

45

55 Mn NQR Study at Mn-II Sites in β-Mn Metal: A Possible Effect of Geometrical Frustration

Hama, Tetsuya, Matsumura, Masahiro, Kato, Harukazu, Yamagata, Hideki, Kohori, Yoh, Kohara, Takao, Iwamoto, Yuji

Journal:

Journal of the Physical Society of Japan

Year:

2004

Language:

english

File:

PDF, 321 KB

english, 2004

46

Development of Micro-Assembling Technology for Fabrication of Large Size Liquid Crystal Displays

Matsumura, Hideki, Ishikawa, Masayuki, Kida, Kenichiro, Maenaka, Koyu, Kuno, Tadaaki, Nitta, Koh-hei, Terano, Minoru, Minami, Shigehira

Journal:

Japanese Journal of Applied Physics

Year:

2006

Language:

english

File:

PDF, 344 KB

english, 2006

47

Quantification of Gas-Phase H-Atom Number Density by Tungsten Phosphate Glass

Morimoto, Takashi, Umemoto, Hironobu, Yoneyama, Koji, Masuda, Atsushi, Matsumura, Hideki, Ishibashi, Keiji, Tawarayama, Hiromasa, Kawazoe, Hiroshi

Journal:

Japanese Journal of Applied Physics

Year:

2005

Language:

english

File:

PDF, 376 KB

english, 2005

48

Annealing Effect of Pb(Zr, Ti)O 3 Ferroelectric Capacitor in Active Ammonia Gas Cracked by Catalytic Chemical Vapor Deposition System

Minamikawa, Toshiharu, Yonezawa, Yasuto, Nakamura, Takashi, Fujimori, Yoshikazu, Masuda, Atsushi, Matsumura, Hideki

Journal:

Japanese Journal of Applied Physics

Year:

1999

Language:

english

File:

PDF, 83 KB

english, 1999

49

Deriving Position of Bending Roll in Roll Bending of Titanium Alloy Wire for Glasses Frame

Sasaki, Yoshinori, Otsu, Masaaki, Matsumura, Masami, Morishita, Kazuyuki, Tanaka, Taiki, Yagi, Hideki, Sekine, Yuichiro, Asakawa, Motoo

Journal:

Procedia Engineering

Year:

2014

Language:

english

File:

PDF, 1.22 MB

english, 2014

50

Drastic Revolution in Catalytic Cvd using “Catalytic Plate” Instead of “Hot Wire”

Masuda, Atsushi, Ishibashi, Yoriko, Matsumura, Hideki

Journal:

MRS Proceedings

Year:

2000

Language:

english

File:

PDF, 151 KB

english, 2000